Resistive C/SiCX (X = O, N) Ceramic Nanocomposite Coatings Prepared from Preceramic Polymers
The versatility of polymer-derived ceramics (PDC) in terms of processing and shaping and their ability to withstand harsh environmental conditions gained consideration for the development of materials for high-temperature applications. For over 40 years, PDCs have been widely explored as bulk materials for both mechanical and electrical applications. In this study, the preceramic polymer was used as a precursor to depositing a ceramic material on a 100 mm - diameter Silicon substrate to produce C/SiCX (X=O, N) nanocomposite thin films. The spin coating technique was employed as the deposition method and no filler was added to the precursor. The process was followed by pyrolysis at 1100°C under Argon atmosphere with a holding time of two hours. The experimental design was done and analyzed using the Taguchi Design of Experiment. Thus, dense ceramic coatings with a thickness of ~10 µm can be achieved without cracks or defects in the surface. The obtained ceramic coatings were structurally characterized by means of vibrational spectroscopies and scanning electron microscopy. The electrical resistance of the films was recorded in the range of 100 - 1000 Ω. This study exhibits the possibility of fabricating defect-free ceramic coatings on a large surface which may be used for microsystem technology applications such as pressure/force sensor arrays.