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WEB Insight about magnetron sputtering using Life Cycle Assessment

Thursday (24.09.2020)
09:15 - 09:30 F: Functional Materials, Surfaces, and Devices 2
Part of:

Magnetron sputtering and physical vapour deposition processes in general are usually regarded as environmentally friendly, thanks to their well controlled environnment and greatly limited emissions during the process. While this is an accurate statement, practicionners of magnetron sputtering are not always aware of the total impact the process could have on the planet. Using life cycle assessment software, the emissions due to the production of the target and the electricity can be assessed. Through a case study of chromium films, results comparing magnetron sputtering to electrodeposition are shown to point out the intrinsic impacts of each process. Despite the use hexavalent chromium in electrodeposition, one can show the higher impact of magnetron sputtering per gram deposited in that specific case. The reasons for the discrepancies between process emissions and environmental impacts are given. A short section about the operational costs is presented. Conclusions about the environmental relevance of physical vapour deposition processes are given.

Antoine Merlo
University of Liège